{"id":1560,"date":"2024-07-25T18:37:11","date_gmt":"2024-07-25T15:37:11","guid":{"rendered":"https:\/\/www.iem.ihu.gr\/?post_type=course&p=1560"},"modified":"2024-07-25T18:56:27","modified_gmt":"2024-07-25T15:56:27","slug":"46-01","status":"publish","type":"course","link":"https:\/\/www.iem.ihu.gr\/en\/courses\/46-01\/","title":{"rendered":"Microelectromechanical Systems"},"author":5,"template":"","meta":{"_acf_changed":false},"semester":[62],"course_type":[59],"class_list":["post-1560","course","type-course","status-publish","hentry","semester--1-4","course_type-optional"],"acf":{"code":"46.01","semester":62,"level":"1","teaching_activities":{"activity_1":{"description":"Theory","weekly_hrs":2,"ects":4},"activity_2":{"description":"Exercises","weekly_hrs":1,"ects":""},"activity_3":{"description":"","weekly_hrs":"","ects":""},"activity_4":{"description":"","weekly_hrs":"","ects":""},"activity_5":{"description":"","weekly_hrs":"","ects":""}},"type":59,"language":"\u0395\u03bb\u03bb\u03b7\u03bd\u03b9\u03ba\u03ac","erasmus":"\u039d\u03b1\u03b9","url":"https:\/\/exams-sm.the.ihu.gr\/course\/view.php?id=106","prerequisites":"","instructors":[1994],"coordinator":"","content":"1. Introduction to MEMS\r\n2. Importance and capabilities\r\n3. Scaling\r\n4. MEMS materials\r\n5. Micromachining techniques\r\n6. Lithography\r\n7. Process flows\r\n8. MEMS Electronics\r\n9. MEMS Mechanics\r\n10. MEMS Application 1 (Micro-Energy)\r\n11. MEMS Application 2 (Micro-Robots)\r\n12. MEMS Foundries\r\n13. Summary","goals":"KNOWLEDGE\r\nUnderstanding of the Micro-Electro-Mechanical-Systems (MEMS) fabrication processes\r\nUnderstanding of operating principles of micro-sensors, micro-actuators and micro-generators\r\nUnderstanding of the main successful examples of MEMS technology\r\nABILITIES\r\nDesign of MEMS devices\r\nProcess flow design for the fabrication of MEMS.\r\nEvaluation of the prospects for new microsystems\r\nUse of MEMS methods and services in the production process","skills":"Search, analysis and synthesis of data and information, using corresponding technologies, Adaptation to new situations, Independent work, Teamwork \u2013 Respect to the natural environment, Promotion of free, creative and inductive thinking","teaching_methods":"Lectures, Exercises, Online guidance, Projected Presentations, E-mail communication, Online Synchronous and Asynchronous Teaching Platform (moodle).","students_evaluation":"Assessment Language: English \/ Greek\r\nPublic Presentations\r\nPractical mid-term examination\r\nFinal Written Examinations\r\nEvaluation criteria:\r\nAbility to design MEMS Systems\r\nAbility to design fabrication process flows.\r\nAbility to select and apply MEMS devices in real applications","bib_textbooks":"Microsystem Design, Stephen D. Senturia, ISBN: 9780306476013, 2001\r\nIntroduction to Solid State Physics 8th Edition, Charles Kittel, ISBN-13: 978-0471415268, 2004","bib_journals":""},"_links":{"self":[{"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/course\/1560","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/course"}],"about":[{"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/types\/course"}],"author":[{"embeddable":true,"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/users\/5"}],"version-history":[{"count":8,"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/course\/1560\/revisions"}],"predecessor-version":[{"id":2200,"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/course\/1560\/revisions\/2200"}],"acf:post":[{"embeddable":true,"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/staff\/1994"}],"acf:term":[{"embeddable":true,"taxonomy":"course_type","href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/course_type\/59"},{"embeddable":true,"taxonomy":"semester","href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/semester\/62"}],"wp:attachment":[{"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/media?parent=1560"}],"wp:term":[{"taxonomy":"semester","embeddable":true,"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/semester?post=1560"},{"taxonomy":"course_type","embeddable":true,"href":"https:\/\/www.iem.ihu.gr\/en\/wp-json\/wp\/v2\/course_type?post=1560"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}